Advanced Energy Industries, Inc. Sekidenko OR400M 非接触式红外温度传感器

The Sekidenko OR400M offers the precise temperature measurement essential to semiconductor applications that require longer wavelengths.","Advanced Energy’s OR400M Optical Pyrometer extends the flexibility of the Sekidenko product family into the mid-IR wavelength range, from 3.3 to 5.2 µm. The OR400M offers a single-channel temperature measurement capability for thin-film solar, glass, and advanced semiconductor processes. The OR400M supports RS-232 and analog data interfaces. Because of its compact design, the OR400M can easily meet small-footprint requirements of many process applications.

特性

• 基于材料类型和所需温度范围的可配置波长
• 集成光学传感器
• 模拟和数字通信，可选现场总线协议，用于闭环控制
• 提高关键工序的温度测量精度
• 提高重复性并最大限度地减少变化
• 提高生产率、产量和吞吐量
• 提高多室和基底材料的稳定性和可靠性
• 采用透镜光学传感器的非接触式温度测量
• 自动环境温度校正
• 行业领先的温度和读取速度
• 高度灵活、基于模块的平台体系结构
• 完整的i/o和外部触发器/同步套件