Kionix / ROHM Semiconductor KXR94-1050 运动传感器 - IMU(惯性测量装置、单元)

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These high-performance silicon micromachined linear accelerometers and inclinometers consist of a sensor element and an ASIC packaged in a 5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricated from single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE) processes, and is protected from the environment by a hermetically-sealed silicon cap at the wafer level. The KXR94 series is designed to provide a high signal-to-noise ratio with excellent performance over temperature. These sensors can accept supply voltages between 2.5V and 5.25V. Sensitivity is factory programmable allowing customization for applications requiring from ±1.0g to ±5.0g ranges. Sensor bandwidth is user-definable. The sensor element functions on the principle of differential capacitance. Acceleration causes displacement of a silicon structure resulting in a change in capacitance. An ASIC, using a standard CMOS manufacturing process, detects and transforms changes in capacitance into an analog output voltage, which is proportional to acceleration. This voltage is digitized by an on-board A\/D converter and is accessed via serial peripheral interface (SPI). The sense element design utilizes common mode cancellation to decrease errors from process variation and environmental stress.

KXR94-1050 运动传感器 - IMU(惯性测量装置、单元)技术参数

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传感器类型 加速计,磁力仪,6 轴
输出类型 SPI
工作温度 -40°C ~ 85°C
封装/外壳 14-LFDFN 裸露焊盘
供应商器件封装 14-DFN(5x5)
安装类型 表面贴装型

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